00000nam##2200000#a#4500002849SLIM2120220411104500.0220411s 0000 00eng d9780521897716621.381Advanced RF MEMSAdvanced RF MEMSLucyszyn, Stephan(ed)1UKCambridge University Press2010xxviii ; 412HBLucyszyn, Stephan(ed)011131011131RFPHNutan Maharashtra Institute of Engg. & TechnologyMBENGRM002849Y